Electrostatic micromotor and its reliability

Research and development in microelectromechanical systems (MEMS) have made remarkable progress since the advent of the first electrostatic micromotor in 1987. Considerable efforts have been directed to the investigation of the failure mechanisms and reliability of electrostatic micromotors. This paper provides a brief overview of failure modes and mechanisms and solving methods in electrostatic micromotors that are commonly met. It focuses on the introduction of the failure modes and mechanisms with numerical and experimental methods as well as the recent methods for reducing the failures and the development in future. In addition, the paper illustrates our investigation on the contact dynamics between the rotor and bearing hub and the effects of gas-lubricated bearing which decrease the possibility of friction, contact, and wear in electrostatic micromotors. 2005 Elsevier Ltd. All rights reserved.